Design and analysis of piezoelectric MEMS micro?speaker based on scandium?doped AlN thin film

Piezoelectric MEMS microspeakers are promising candidates for miniaturized speakers, such as in-ear applications. Using lead-free scandium doped aluminium nitride (ScAlN) thin film instead of lead zirconium titanate helps these speakers to be environmental friendly, CMOS compatible and potentially more linear. The piezoelectric coefficient ScAlN is higher than undoped AlN, which leads improved performance actuators including speaker chips. design based on four triangular cantilevers proposed. in this work has been verified by finite element method simulation. displacement sound pressure level 39 ?m 56 dB, respectively. This loudspeaker small size simple structure. model opens the door also further optimization energy efficiency acoustic film.